JPS6313357B2 - - Google Patents

Info

Publication number
JPS6313357B2
JPS6313357B2 JP53150003A JP15000378A JPS6313357B2 JP S6313357 B2 JPS6313357 B2 JP S6313357B2 JP 53150003 A JP53150003 A JP 53150003A JP 15000378 A JP15000378 A JP 15000378A JP S6313357 B2 JPS6313357 B2 JP S6313357B2
Authority
JP
Japan
Prior art keywords
pressure
semiconductor
diaphragm
thickness
strain gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53150003A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5577178A (en
Inventor
Tadahiro Hayashi
Fumishiro Yamaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP15000378A priority Critical patent/JPS5577178A/ja
Publication of JPS5577178A publication Critical patent/JPS5577178A/ja
Publication of JPS6313357B2 publication Critical patent/JPS6313357B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP15000378A 1978-12-06 1978-12-06 Semiconductor pressure converting element Granted JPS5577178A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15000378A JPS5577178A (en) 1978-12-06 1978-12-06 Semiconductor pressure converting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15000378A JPS5577178A (en) 1978-12-06 1978-12-06 Semiconductor pressure converting element

Publications (2)

Publication Number Publication Date
JPS5577178A JPS5577178A (en) 1980-06-10
JPS6313357B2 true JPS6313357B2 (en]) 1988-03-25

Family

ID=15487335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15000378A Granted JPS5577178A (en) 1978-12-06 1978-12-06 Semiconductor pressure converting element

Country Status (1)

Country Link
JP (1) JPS5577178A (en])

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2130435B (en) * 1982-10-27 1986-10-15 Tokyo Shibaura Electric Co Semiconductor strain sensor and method for manufacturing the same
JPS6174374A (ja) * 1984-09-19 1986-04-16 Toyota Central Res & Dev Lab Inc 半導体圧力変換器
JP3289196B2 (ja) * 1991-06-27 2002-06-04 ドレッサ・ナガノ、インク 変換器の全非直線性を低減する方法及び変換器の非直線性を低減する方法
JP3323032B2 (ja) * 1995-06-07 2002-09-09 三菱電機株式会社 半導体圧力検出装置の設計方法
JP6694747B2 (ja) * 2016-03-31 2020-05-20 京セラ株式会社 応力センサ及びその製造方法
JP6882850B2 (ja) * 2016-03-31 2021-06-02 京セラ株式会社 応力センサ
US10866203B2 (en) 2016-03-31 2020-12-15 Kyocera Corporation Stress sensor
JP6908355B2 (ja) * 2016-03-31 2021-07-28 京セラ株式会社 応力センサ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237949B2 (en]) * 1972-12-15 1977-09-26

Also Published As

Publication number Publication date
JPS5577178A (en) 1980-06-10

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